Published In Nucl. Instr. and Meth. in Phys. Res. B Date Sun, 12/15/2013 - 12:00 Volume 317 (B) Pages 661-664 DOI 10.1016/j.nimb.2013.08.058 Refine Ti:Sa Paper Category RILIS Development Author(s) S Rothe; V N Fedosseev; T Kron; B A Marsh; R E Rossel; K D A Went